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020 _a0-619-21750-2
082 _a658.4038
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100 _aMikael;Carl
245 0 _aProcess Technology For Silicon Carbide Devices
260 _bThomson
_aUSA
_c2006
300 _a480
650 _aComputer
_vComputer
942 _cBK
999 _c15408
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