| 000 | 00412nam a2200145Ia 4500 | ||
|---|---|---|---|
| 008 | 230312s9999||||xx |||||||||||||| ||und|| | ||
| 020 | _a8124205066 | ||
| 082 |
_a621.38152 _bSEM |
||
| 245 | 0 | _aSemiconductor silicon technology | |
| 260 |
_bCrest _aNew Delhi _c2005 |
||
| 300 | _a795 | ||
| 546 | _aEng. | ||
| 650 |
_aEngineering _vSilicon Precursors, Polysilicon preparation, Crystal growth of silicon |
||
| 942 | _cBK | ||
| 999 |
_c1352 _d1352 |
||