TY  - BOOK
AU  - Helbert;John.N
TI  - VLSI Microlithography
SN  - 81-7992-475-0
U1  - 621.3822 
PY  - 2005///
CY  - USA
PB  - Willian Adrew
KW  - Engineering
KW  - VLSI Microlithography
ER  -